Ann Arbor, Mich.
The University of Michigan dedicated the Robert H. Lurie Nanofabrication Facility at the School of Engineering in Ann Arbor on April 12, 2008. Designed by SmithGroup, the project is a 32,000-sf addition to the existing Solid State Electronics Laboratory (SSEL) cleanroom facility. Featuring a three-level cleanroom concept, the project includes a fab, sub-fab, and mechanical space. Supporting etch, diffusion, lithography, deposition, and thin films techniques and tools, the expansion incorporates a modular aluminum wall panel system for ease of reconfiguration.
